Item description for Microsystem Technology and Microrobotics (Microsystem Technology & Microrobotics) by Sergej Fatikow...
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.
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Est. Packaging Dimensions: Length: 9.29" Width: 6.38" Height: 0.87" Weight: 1.68 lbs.
Release Date Feb 12, 2002
ISBN 3540606580 ISBN13 9783540606581
Availability 134 units. Availability accurate as of Feb 21, 2017 07:20.
Usually ships within one to two business days from La Vergne, TN.
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