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Sputtering by Particle Bombardment: Experiments and Computer Calculations from Threshold to MeV Energies (Topics in Applied Physics) (Topics in Applied Physics) [Hardcover]

By Rainer Behrisch (Editor) & Wolfgang Eckstein (Editor)
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Item description for Sputtering by Particle Bombardment: Experiments and Computer Calculations from Threshold to MeV Energies (Topics in Applied Physics) (Topics in Applied Physics) by Rainer Behrisch & Wolfgang Eckstein...

This volume gives a comprehensive overview about the physical processes causing sputtering of solids at bombardment with energetic ions. The most important quantities are the sputtering yields, i.e. the average number of atoms eroded per incident ion. The latest results for the sputtering yields and their dependence on the incident energy and angle of incidence, as well as the energy and angular distributions of the sputtered atoms are presented. This concerns experimentally determined yields as well as a critical evaluation of the computational methods used to calculate the yields and distributions. The energies of the incident ions cover the range between a few eV up to several MeV. The influence of chemical effects between the incident ions and the atoms of the bombarded solid on the sputtering yields are also reviewed.





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Item Specifications...


Pages   507
Est. Packaging Dimensions:   Length: 0.75" Width: 6" Height: 9"
Weight:   1.88 lbs.
Binding  Hardcover
Release Date   Sep 10, 2007
Publisher   Springer
ISBN  3540445005  
ISBN13  9783540445005  


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1Books > Subjects > Professional & Technical > Engineering > Chemical > Materials
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4Books > Subjects > Professional & Technical > Engineering > Materials > Mechanical Properties of Solids
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8Books > Subjects > Science > Chemistry > General & Reference
9Books > Subjects > Science > General
10Books > Subjects > Science > Physics > General



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