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Modelling of Microfabrication Systems [Hardcover]

By Raja Nassar (Editor) & W. Dai (Editor)
Our Price $ 139.30  
Retail Value $ 199.00  
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Item Number 235009  
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Item description for Modelling of Microfabrication Systems by Raja Nassar & W. Dai...

This book addresses modeling of systems that are important to the fabrication of three-dimensional microstructures. Selected topics are ion beam micromachining, x-ray lithography, laser chemical vapor deposition, photopolymerization, laser ablation, and thin films. Models simulating the behavior of these systems are presented, graphically illustrated, and discussed in the light of experimental results. Knowledge gained from such models is essential for system operation and optimization. This book is unique in that it focuses on high aspect ratio microtechnology. It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications.

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Item Specifications...

Pages   350
Est. Packaging Dimensions:   Length: 0.75" Width: 6.25" Height: 9.25"
Weight:   1.15 lbs.
Binding  Hardcover
Release Date   Aug 5, 2003
Publisher   Springer
ISBN  3540002529  
ISBN13  9783540002529  

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