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Handbook of Advanced Plasma Processing Techniques [Hardcover]

Our Price $ 375.06  
Retail Value $ 399.00  
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Item Number 226532  
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Item description for Handbook of Advanced Plasma Processing Techniques by R.J. Shul...

This volume covers the topic of advanced plasma processing techniques, from the fundamental physics of plasmas to diagnostics, modeling and applications such as etching and deposition for microelectronics. The use of plasmas for patterning on a submicron scale has enabled successive generations of continually smaller transistors, lasers, micromachines, sensors and magnetic read/write heads that have formed the basis of our information age. This volume is the first to give coverage to this broad area of topics in a detailed fashion, especially in the rapidly expanding fields of micro-mechanical machines, photomask fabrication, magnetic data storage and reactor modeling. It provides the reader with a broad array of topics, authored by the leading experts in the field.

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Item Specifications...

Pages   653
Est. Packaging Dimensions:   Length: 9.4" Width: 6.5" Height: 1.23"
Weight:   2.35 lbs.
Binding  Hardcover
Publisher   Springer
ISBN  3540667725  
ISBN13  9783540667728  

Availability  148 units.
Availability accurate as of Oct 24, 2016 11:35.
Usually ships within one to two business days from La Vergne, TN.
Orders shipping to an address other than a confirmed Credit Card / Paypal Billing address may incur and additional processing delay.

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1Books > Special Features > Substores > jp-unknown3
2Books > Subjects > Professional & Technical > Engineering > Aerospace > Advanced Mechanics
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6Books > Subjects > Professional & Technical > Engineering > Mechanical > General
7Books > Subjects > Professional & Technical > Professional Science > Physics > General
8Books > Subjects > Science > General
9Books > Subjects > Science > Physics > General

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