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SiO2 in Si Microdevices [Hardcover]

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Item Number 229944  
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Item description for SiO2 in Si Microdevices by Manabu Itsumi...

Electronic systems and digital computers are an indispensable element of modern multimedia technologies and the Internet society. But their explosive advance would not have been possible without the extraordinary progress in VLSI technology using high-quality SiO2. This volume addresses the thin gate oxides involved in the individual processes in fabrication, e.g. the growth, cleaning and thermal oxidation of silicon, metal interconnect formation, and photolithography. It describes new methods for observing defects in SiO2 as well as novel approaches to eliminating such defects. The book will be a valuable resource for all materials scientists and engineers seeking to further advance the quality of silicon microdevices.

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Item Specifications...

Pages   334
Est. Packaging Dimensions:   Length: 9.3" Width: 6" Height: 0.9"
Weight:   1.4 lbs.
Binding  Hardcover
Release Date   Jan 17, 2003
Publisher   Springer
ISBN  3540433392  
ISBN13  9783540433392  

Availability  0 units.

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1Books > Special Features > Formats
2Books > Special Features > New & Used Textbooks > Engineering > Electrical & Electronics
3Books > Subjects > Computers & Internet > Computer Science > Circuitry > Circuit Components
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8Books > Subjects > Professional & Technical > Engineering > Electrical & Optical > Semiconductors
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10Books > Subjects > Professional & Technical > Engineering
11Books > Subjects > Professional & Technical > Professional Science > Physics > Nanostructures
12Books > Subjects > Science > General
13Books > Subjects > Science > Physics > Nanostructures

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