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Mechanical Microsensors (Microtechnology and MEMS) [Hardcover]

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Retail Value $ 249.00  
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Item Number 226287  
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Item description for Mechanical Microsensors (Microtechnology and MEMS) by Miko Elwenspoek & Remco J. Wiegerink...

This book provides a comprehensive description of microsensors for mechanical quantities (flow, pressure, force, inertia) fabricated by silicon micromachining. Since the design of such sensors requires interdisciplinary teamwork, the presentation is made accessible to engineers trained in electrical and mechanical engineering, physics and chemistry. The reader is guided through the micromachining fabrication process. A chapter on microsensor packaging completes the discussion of technological problems. The description of the basic physics required for sensor design includes the mechanics of deformation and the piezoresistive transduction to electrical signals. There is also a comprehensive discussion of resonant sensors, the hydrodynamics and heat transfer relevant for flow sensors, and, finally, electronic interfacing and readout circuitry. Numerous up-to-date case studies are presented, together with the working, fabrication and design of the sensors.

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Item Specifications...

Pages   295
Est. Packaging Dimensions:   Length: 0.5" Width: 6.25" Height: 9.25"
Weight:   1.25 lbs.
Binding  Hardcover
Release Date   Jan 12, 2001
Publisher   Springer
ISBN  3540675825  
ISBN13  9783540675822  

Availability  64 units.
Availability accurate as of Oct 21, 2016 09:26.
Usually ships within one to two business days from La Vergne, TN.
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More About Miko Elwenspoek & Remco J. Wiegerink

Register your artisan biography and upload your photo! M. Elwenspoek was born in 1948 and has an academic affiliation as follows - University of Twente, Enschede, The Netherlands.

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Product Categories

1Books > Special Features > New & Used Textbooks > Engineering > Electrical & Electronics
2Books > Subjects > Computers & Internet > Computer Science > Circuitry > Microelectronic Devices
3Books > Subjects > Professional & Technical > Engineering > Electrical & Electronics > Electricity Principles
4Books > Subjects > Professional & Technical > Engineering > Electrical & Optical > Electronics > General
5Books > Subjects > Professional & Technical > Engineering > Electrical & Optical > Electronics > Microelectronics
6Books > Subjects > Professional & Technical > Engineering > Electrical & Optical > General
7Books > Subjects > Professional & Technical > Engineering > General
8Books > Subjects > Professional & Technical > Engineering > Industrial, Manufacturing & Operational Syste > General
9Books > Subjects > Professional & Technical > Engineering > Industrial, Manufacturing & Operational Syste > Manufacturing
10Books > Subjects > Professional & Technical > Engineering > Mechanical > General
11Books > Subjects > Professional & Technical > Engineering > Special Topics > Measurement
12Books > Subjects > Science > General
13Books > Subjects > Science > Technology > Nanotechnology

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