Item description for Ion Sources by Jianrong Zhang Huashun Zhang...
Ion implantation has become a basic technology in device manufacturing. For efficient use of this accelerator-based technique the choice of appropriate ion sources is important. This book deals with the design and operation of ion sources. Additionally the physics of ion formation of the various elements with different charge states and charge neutralization are discussed. Ion selection and beam diagnostics are part of the book too. The presentation of the necessary equations and diagrams for the various parameters makes this book useful as a handbook for ion sources.
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Est. Packaging Dimensions: Length: 9.3" Width: 6.3" Height: 1.5" Weight: 1.85 lbs.
Release Date Dec 10, 1999
ISBN 3540657479 ISBN13 9783540657477
Availability 134 units. Availability accurate as of May 27, 2017 12:00.
Usually ships within one to two business days from La Vergne, TN.
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