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Niederdruckplasmen und Mikrostrukturtechnik [Hardcover]

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Item description for Niederdruckplasmen und Mikrostrukturtechnik by Gerhard Franz...

In diesem Buch werden zunchst die verschiedenen Typen von Plasmen ausfhrlich beschrieben: Gleichstrom-Entladung, kapazitive und induktive Kopplung mit Radiofrequenz, die magnetfelduntersttzte Anregung mittels Heliconwellen; schliesslich noch Ionenstrahlen. Breiten Raum nimmt dann die Plasmadiagnostik ein, die in einem separaten Kapitel mit vier Methoden exemplarisch vorgestellt wird. Daran anschliessend erfolgt eine umfassende Darstellung der beiden modernen Verfahren Sputtern und Trockentzen, mit denen heute Oberflchen durch Beschichten und gezieltes Abtragen auf vielfltige Weise modifiziert werden. Besondere Aufmerksamkeit wird reaktiven Verfahren und den dort auftretenden Reaktionsmechanismen, aber auch der Ionenstrahlmethode, gewidmet. Zahlreiche Anwendungsbeispiele sind in den Text eingestreut. Fr die Neuauflage wurde das Buch vollstndig neu bearbeitet und aktualisiert. Hinzu kamen neue Kapitel ber Plasmadiagnostik und hochdichte sowie induktiv-gekoppelte Plasmen.

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Item Specifications...

Pages   543
Est. Packaging Dimensions:   Length: 9.37" Width: 6.06" Height: 1.42"
Weight:   2.25 lbs.
Binding  Hardcover
Release Date   Dec 2, 2003
Publisher   Springer
ISBN  3540407650  
ISBN13  9783540407652  

Availability  149 units.
Availability accurate as of May 24, 2017 09:42.
Usually ships within one to two business days from La Vergne, TN.
Orders shipping to an address other than a confirmed Credit Card / Paypal Billing address may incur and additional processing delay.

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Product Categories

1Books > Calendars > Foreign Language
2Books > Foreign Language Books > German > All German Books
3Books > Foreign Language Books > German > Nonfiction
4Books > Foreign Language Books > German > Professional & Technical
5Books > Special Features > New & Used Textbooks > Sciences > Physics
6Books > Subjects > Professional & Technical > Engineering > Electrical & Optical > Optics > General
7Books > Subjects > Professional & Technical > Engineering > Materials > General
8Books > Subjects > Professional & Technical > Professional Science > Physics > Nuclear Physics

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