Item description for Excimer Laser Technology (Advanced Texts in Physics) by Dirk Basting...
This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology. Additional chapters on optics, devices and laser systems complete this compact handbook. A must read for laser technology students, process application researchers, engineers or anyone interested in excimer laser technology. An effective and understandable introduction to the current and future status of excimer laser technology.
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Est. Packaging Dimensions: Length: 9.5" Width: 6.4" Height: 0.9" Weight: 1.9 lbs.
Release Date Jan 1, 2005
ISBN 3540200568 ISBN13 9783540200567
Availability 90 units. Availability accurate as of Mar 30, 2017 08:50.
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Reviews - What do customers think about Excimer Laser Technology (Advanced Texts in Physics)?
It was written by Lambda Physik (Coherent) researchers. Do I have to say anything else? Aug 9, 2006
If you're interested in excimer lasers enough to be curious about how they work and would like to gain further insight into areas of application, get this book. This is a nice reference, specially if you're into lithography/optical engineering. It was written by Lambda Physik (Coherent) researchers. Do I have to say anything else?