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Cantilever-Based CMOS Sensor Systems [Hardcover]

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Item Number 230046  
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Item description for Cantilever-Based CMOS Sensor Systems by D. Lange...

This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of physical quantities such as forces and mass changes. The book is divided into three parts. First fabrication aspects and the mechanisms of cantilever resonators are introduced. Of the possible driving and sensing mechanisms, electrothermal and magnetic excitation, as well as piezoresistive detection and the use of MOS transistors for the deflection detection are introduced. This is followed by two application examples: The use of resonant cantilevers for the mass-sensitive detection of volatile organic compounds, and force sensor arrays for parallel Scanning Atomic Force Microscopy (AFM) of large areas.

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Item Specifications...

Pages   158
Est. Packaging Dimensions:   Length: 9.1" Width: 6.2" Height: 0.6"
Weight:   0.85 lbs.
Binding  Hardcover
Release Date   Sep 17, 2002
Publisher   Springer
ISBN  3540431438  
ISBN13  9783540431435  

Availability  82 units.
Availability accurate as of Oct 26, 2016 01:23.
Usually ships within one to two business days from La Vergne, TN.
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More About D. Lange

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