Item description for Cantilever-Based CMOS Sensor Systems by D. Lange...
This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of physical quantities such as forces and mass changes. The book is divided into three parts. First fabrication aspects and the mechanisms of cantilever resonators are introduced. Of the possible driving and sensing mechanisms, electrothermal and magnetic excitation, as well as piezoresistive detection and the use of MOS transistors for the deflection detection are introduced. This is followed by two application examples: The use of resonant cantilevers for the mass-sensitive detection of volatile organic compounds, and force sensor arrays for parallel Scanning Atomic Force Microscopy (AFM) of large areas.
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Est. Packaging Dimensions: Length: 9.1" Width: 6.2" Height: 0.6" Weight: 0.85 lbs.
Release Date Sep 17, 2002
ISBN 3540431438 ISBN13 9783540431435
Availability 82 units. Availability accurate as of May 29, 2017 02:11.
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