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Semiconductor Manufacturing Technology (Advanced Series in Electrical and Computer Engineering) (Advances Series in Electircal and Computer Engineering) [Hardcover]

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Item Number 165661  
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Item description for Semiconductor Manufacturing Technology (Advanced Series in Electrical and Computer Engineering) (Advances Series in Electircal and Computer Engineering) by Chue San Yoo...

This textbook contains all the materials that an engineer needs to know to start a career in the semiconductor industry. It also provides readers with essential background information for semiconductor research. It is written by a professional who has been working in the field for over two decades and teaching the material to university students for the past 15 years. It includes process knowledge from raw material preparation to the passivation of chips in a modular format.

Contents:

  • Building Blocks for Integrated Circuits;
  • Thermal Oxidation;
  • Gas Kinetics and Plasma Physics;
  • Chemical Vapor Deposition;
  • Plasma-Enhanced Chemical Vapor Deposition and Etching;
  • Pattern Transfer: Photolithography;
  • Pattern Generation;
  • Doping Technology;
  • Metallization and Silicidation;
  • Planarization and CMP Technology;
  • Copper and Low-k.




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Item Specifications...


Studio: World Scientific Publishing Company
Pages   470
Est. Packaging Dimensions:   Length: 1" Width: 6.5" Height: 9.25"
Weight:   1.8 lbs.
Binding  Hardcover
Release Date   Mar 3, 2008
Publisher   World Scientific Publishing Company
ISBN  9812568239  
ISBN13  9789812568236  


Availability  0 units.


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Product Categories

1Books > Subjects > Professional & Technical > Engineering > Electrical & Electronics > Electricity Principles
2Books > Subjects > Professional & Technical > Engineering > Electrical & Optical > General
3Books > Subjects > Professional & Technical > Engineering > Electrical & Optical > Semiconductors
4Books > Subjects > Professional & Technical > Engineering > Industrial, Manufacturing & Operational Syste > Manufacturing
5Books > Subjects > Professional & Technical > Medical > Medicine > Surgery > Neurosurgery
6Books > Subjects > Science > General
7Books > Subjects > Science



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