Item description for Semiconductor Manufacturing Technology (Advanced Series in Electrical and Computer Engineering) (Advances Series in Electircal and Computer Engineering) by Chue San Yoo...
This textbook contains all the materials that an engineer needs to know to start a career in the semiconductor industry. It also provides readers with essential background information for semiconductor research. It is written by a professional who has been working in the field for over two decades and teaching the material to university students for the past 15 years. It includes process knowledge from raw material preparation to the passivation of chips in a modular format.
Building Blocks for Integrated Circuits;
Gas Kinetics and Plasma Physics;
Chemical Vapor Deposition;
Plasma-Enhanced Chemical Vapor Deposition and Etching;
Pattern Transfer: Photolithography;
Metallization and Silicidation;
Planarization and CMP Technology;
Copper and Low-k.
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Studio: World Scientific Publishing Company
Est. Packaging Dimensions: Length: 1" Width: 6.5" Height: 9.25" Weight: 1.8 lbs.
Release Date Mar 3, 2008
Publisher World Scientific Publishing Company
ISBN 9812568239 ISBN13 9789812568236